The invention relates to measurement technology and can be used in devices for measuring the pyroelectric coefficient of materials used in microelectronic devices: sensors, thermal detectors, thermal imagers, etc. In the method, a pyroelectric sample is uniformly heated, the pyroelectric charge on the capacitor is integrated, and the voltage across the capacitor proportional to the pyroelectric charge is measured. The voltage across the capacitor is compared to a reference voltage. If the capacitor voltage reaches or exceeds the reference voltage, the heating is stopped and the sample is cooled evenly. At the moment when the voltage on the capacitor reaches zero, cooling is stopped, the cycle is repeated and the frequency of self-oscillations is measured and the pyroelectric coefficient is determined by the formula. Technical result: improved accuracy of determining the pyroelectric coefficient of materials.

Comments are closed