A device for ionic thermochemical treatment of the inner surface of a tubular part contains a vacuum chamber with a part installed therein, a tubular anode coaxially placed inside the part with holes for gas passage evenly distributed along the side surface of the anode inside the part cavity, the anode is installed and fixed on the axis of the part and isolated from it by means of covers pressed to both ends of the part. In this case, the first open end of the anode is connected by a first pipeline to a source of working gas. The first cover on the first end of the workpiece has openings for the working gas to escape from the workpiece cavity into the vacuum chamber cavity, which is connected to the pumping system. The negative pole of the electrical power source is connected to the part acting as a cathode of the ion-generating gas discharge. The positive pole of the source is connected to the anode, respectively, and the electrical conductors connecting the poles of the power supply to the part and the anode are isolated from the vacuum chamber body. The second cover at the second end of the workpiece has openings for the working gas to escape from the workpiece cavity into the vacuum chamber cavity. The second open end of the anode is connected by a second pipeline to the inlet of the cooling device. The outlet of the cooling device is connected through an adjustable gas valve to the inlet of the gas transfer pump, the outlet of which is connected to the first pipeline, which is equipped with a meter for the total gas flow supplied to the anode.
The utility model belongs to the technologies of ionic thermochemical treatment of parts for mechanical engineering and can be used in the creation of equipment that ensures the implementation of the technological process to improve performance, in particular, to increase the hardness and wear resistance of the inner surface of long tubular parts, the length of which ranges from tens of centimeters to several meters and can be more than 10 times higher than the diameter of the hole.