The invention relates to the field of mechanical engineering and concerns processes associated with the diffusion saturation of the surface layer of workpieces with chemical elements from an iongenerating glow discharge.
The method involves placing the workpiece in a vacuum chamber, and installing an electrode-anode coaxially along the entire length of the workpiece. At the stage of placing the workpiece in the vacuum chamber, the workpiece is connected to the negative pole of the first power supply, and the electrode-anode is connected to its positive pole, the leads of the second AC power supply are connected to both ends of the electrode-anode to heat it and generate an azimuthal alternating magnetic field in the workpiece cavity with an induction of more than 1 mT for magnetic plasma scanning along the workpiece. The working gas is supplied directly to the workpiece cavity. Its inner surface is treated in an anomalous glow discharge plasma, the part is heated by ion bombardment and additionally by a hot electrode-anode. Also, a corresponding device for implementing the proposed method is presented.
The invention makes it possible to increase the uniformity of processing the inner surface of a tubular workpiece and reduce the likelihood of its damage by arc discharge.